A Study of AlN-ZnO/ZnO Quantum Well Structure with barrier layer Applied to ZnO/GaN Light-Emitting Diode
碩士 === 國立虎尾科技大學 === 光電工程系光電與材料科技碩士班 === 105 === In this study, we use RF magnetron co-sputtering system to deposit the ZnO thin film and AlN-ZnO co-sputtered thin film by Aluminum nitride (AlN), Zinc Oxide (ZnO) target, and Fabrication the ZnO/GaN heterostructure and AlN-ZnO/ZnO quantum well structu...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2017
|
Online Access: | http://ndltd.ncl.edu.tw/handle/7zw8s2 |