Study of the Film Quality by the Vibrational Evaporation
碩士 === 國立虎尾科技大學 === 電子工程系碩士班 === 105 === In this paper, the metal thin films were prepared by vacuum thermal evaporation method, and the surface vibration caused by the surface vibration on the substrate and the sound waves was investigated during the deposition process. And to explore whether the s...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/jn4yg4 |