Study of the Film Quality by the Vibrational Evaporation

• Main Authors: You-Cai Cai, 蔡有財
• Other Authors: 陳文瑞
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/jn4yg4

碩士 === 國立虎尾科技大學 === 電子工程系碩士班 === 105 === In this paper, the metal thin films were prepared by vacuum thermal evaporation method, and the surface vibration caused by the surface vibration on the substrate and the sound waves was investigated during the deposition process. And to explore whether the surface vibration can improve the quality of the film process in the thermal evaporation process and demonstrate that the surface vibration has an influence on the roughness of the film and the uniformity of the film after the surface profilometer. The surface vibration was applied to the surface of the glass substrate with 50 × 50 × 0.5mm and 100 × 100 × 0.5mm, and the average difference between the uniformity and the roughness of the surface vibration was increased at different time. The average difference was about 10nm. In the experiment, according to the Harvard University experiment, we found that the reflected light in different materials according to the different material and produce color differences, in the experiment germanium material deposited on the gold beryllium substrate, when the thickness of 10nm Above, the color began to produce differences from orange to blue, and by the color contrast difference to prove that the surface vibration can reach the uniformity of film thickness and roughness of the situation. And after a week after the release of the surface color changes, it is speculated that the surface germanium film should be caused by surface stress or oxidation. And to explore the different coating parameters for the infrared thermal image measurement, compared with its high-emissivity far-infrared materials, the impact of its thin film on the far-infrared radiation, through these experiments can help us understand the film thickness and substrate surface treatment differences On the impact of high emissivity far infrared radiation, and the future of the experiment will be applied to the relevant sensing, automatic detection machine, hidden code, authenticity identification, expiration date, etc., can reduce the projection of additional light source.