The study of Ga2O3 and TiO2 Thin Film and Distributed Bragg Reflection Structure by RF Magnetron Sputter System
碩士 === 南臺科技大學 === 光電工程系 === 105 === In this paper, Ga2O3, TiO2 and SiO2 films were grown by plasma enhanced chemical vapor deposition(PECVD) and RF magnetron sputtering. The results show that the luminescent properties of the films are observed by scanning electron microscope, transmission electron...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/70900545616719818432 |