Research and development of full-field chromatic confocal microscopic profilometry using multispectral sensing principle
碩士 === 國立臺北科技大學 === 自動化科技研究所 === 105 === In the thesis, a full-field chromatic confocal microscopic profilometry system is proposed. Using digital micromirror device and chromatic dispersive objective, the developed system accomplishes area-type chromatic confocal system. In the system setup, precis...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/v47uc4 |