A Study on Photo-Assisted Electrochemical Etching and Ultrasonic Agitation in Supercritical Electroplating Process
博士 === 國立臺北科技大學 === 機電科技研究所 === 105 === This study can be divided into “Fabrication of Though-Silicon Via Arrays by Photo-Assisted Electrochemical Etching and Supercritical Electroplating” and “The Influence of Ultrasonic Agitation on Supercritical Electroplating”. In the first part, the study aims...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/e3hedg |