Design and Analysis on the performance of Dry Scroll Vacuum Pump with Involute of Variable-Radii Circle
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 105 === Dry scroll vacuum pumps (DSVP) are gradually prevailing in semiconductor industry, chemical engineering, pharmacy, scientific instrument and other industries and fields due to their advantages of oil-freeness, dependable performance, wide working range,...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2017
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Online Access: | http://ndltd.ncl.edu.tw/handle/3tjuay |