Study of the Performance Improvement of a Clean-Room Ventilator by Internal Structure Modification
碩士 === 國立雲林科技大學 === 機械工程系 === 105 === The object of this research is a ventilation device commonly used in the clean room of semiconductor process, and its main component is a centrifugal fan arranged in the center of the cabinet. It is hoped that without changing the design and size of the centr...
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| Format: | Others |
| Language: | zh-TW |
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2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9hq4c6 |