Characteristic Analysis and Study of Graphene Expitaxy on SiC
碩士 === 國防大學理工學院 === 材料科學與工程碩士班 === 106 === This paper attempts to deposit graphene on the surface of SiC substrate by chemical vapor deposition without catalyst addition. These results show that through different deposition conditions and cracking methane can only obtain a carbon deposit on the surf...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/p5f2q7 |