A CMOS-MEMS Capacitive Sensing System with All Digital Phase-Locked Loop Readout
碩士 === 國立中正大學 === 電機工程研究所 === 106 === A pressure sensing system consisting of the MEMS pressure sensor and the readout circuits on a single chip by CMOS MEMS technology is presented. In-house wet etching post process is used to release the MEMS structure. Pressure signal is converted into capacitanc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/62zk4r |