Fabrication of Au/PMMA Composite Gratings through Optimization of the Direct Imprint and Insertion Imprint Processes and RIE Etching Process
碩士 === 國立中正大學 === 機械工程系研究所 === 106 === In this study, gold/PMMA comosite gratings of nano-scale were fabricated by combining Direct Metal Nanoimprint process and Insertion Nanoimprint process. Instead of using conventional photolithographic method, gold gratings were formed on Si-substrate under m...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/2h3he6 |