Investigation of Property of Diamond-like Carbon Films Deposited by Plasma Enhanced Chemical Vapor Deposition
碩士 === 大葉大學 === 醫療器材設計與材料碩士學位學程 === 106 === In this study, diamond-like carbon (DLC) films are prepared on Ti-6Al-4V and on glass substrates by using a plasma-enhanced chemical vapor deposition system with a gas mixture of CH4 and H2. The power and substrate bias are varied from 50-500 W and 30-60 W...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/a7ukxv |