An Investigation of Wear Properties of Anti-Relfection Coatings made with Aluminum Oxynitride Films by High Power Impulsed Magnetron Sputtering with Different Pulse Configurations
碩士 === 逢甲大學 === 光電學系 === 106 === Antirefelction coating (ARC) is widely used today, but general ARC doesn't have wear resistance characteristics and there are currently few researches on the wear resistance of optical films. Therefore, this experiment prepare ARC with wear resistance characteri...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/y8thb9 |