Hydrogen Plasma Treatment Investigated Metal Oxide Semiconductor Gas Sensing Film
碩士 === 崑山科技大學 === 電機工程研究所 === 106 === This work applies hydrogen plasma treatment on SnO2 films used in gas sensor to form nanoparticles. Increasing surface area of SnO2 by transferring films to particles raises sensor response sensitivity. Effects of plasma process parameters on surface of SnO2 and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7wcszv |