Study on the Growth of Tungsten Oxide Nano-rods by Thermal Oxidation for Hydrogen Sensing Properties
碩士 === 崑山科技大學 === 電機工程研究所 === 106 === In this study, a tungsten film was coated on a silicon substrate plated with an electrode by direct current sputtering, and then the tungsten film was oxidized by a thermal oxidation method to prepare a WO3 hydrogen sensor. Different structures of tungsten oxide...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/brwv6e |