The influence evaluation of different positive resists on the dry etching process
碩士 === 國立高雄應用科技大學 === 化學工程與材料工程系博碩士班 === 106 === The passive component products in the semiconductor industry is indispensable, and MIM (Metal-Insulator-Metal) capacitor manufacturing process is one of the most important of passive components. The MIM process includes photo process and dry etching p...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4h586g |