Data-Driven Modeling Using System Integration Scaling Factors and Positioning Performance of an Exposure Machine System
博士 === 國立高雄應用科技大學 === 電機工程系博碩士班 === 106 === A data-driven modeling approach is proposed for using system integration scaling factors and positioning performance of an exposure machine system to build models for predicting positioning errors and for analyzing parameter sensitivity. The proposed a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/p723za |