Design of Wide Range Pirani Gauges
碩士 === 國立高雄應用科技大學 === 光電與通訊工程研究所 === 106 === A wide-range Pirani vacuum gauge with a sensing range of 10-4 Torr - 760 Torr was proposed in this thesis by integrating the sensing mechanism of a Pirani sensor and the operating principle of a Wheatstone bridge circuit into the design of the sensor. The...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2018
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Online Access: | http://ndltd.ncl.edu.tw/handle/meze58 |