A CMOS-MEMS Pirani Gauge with Wide Sensing Range
碩士 === 國立高雄應用科技大學 === 光電與通訊工程研究所 === 107 === A MEMS Pirani gauge with a wide sensing range of 10-4 Torr - 760 Torr was designed and manufactured by adopting TSMC 0.35μm 2P4M CMOS-MEMS D35 standard process in this thesis. In this study, two MEMS Pirani sensing elements with different sensing range we...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24m29p |