Design and Realization of Dual-Stage Nano-Positioning Stage for Long Range Travel
碩士 === 龍華科技大學 === 機械工程系碩士班 === 106 === This thesis is aims to study research of large-travel nano-scale positioning system. Due to the rapid development of high exact machining technology, the demand of machining precision is higher and higher and to increase the length of motion to achieve the dema...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9t8kae |