| Summary: | 碩士 === 龍華科技大學 === 機械工程系碩士班 === 106 === This thesis is aims to study research of large-travel nano-scale positioning system. Due to the rapid development of high exact machining technology, the demand of machining precision is higher and higher and to increase the length of motion to achieve the demand of large-travel and nano-scale positioning and the large-travel. Thus, we develop the large-travel nano-scale position system driven by single axis robot coupled with piezoelectricity based on the conception of two-phase combination drive. This system uses servo motor to drive the large-travel precision positioning platform and conducts the high positioning for the large-travel, with the precision of the micro-scale. Then, it compensates for the error amount by using micro ultra-high precision positioning platform to achieve nano-scale positioning. With the utilization of this design, the positioning precision of Single Axis Robot can be improved. Besides, the research of two-phase combination drive construct we make the mathematical models of the large-travel precision positioning platform and micro ultra-high precision positioning platform according to the features and principles of the mechanism. The PLC is used in the control system for the positioning of the large-travel nano-scale position system driven by single axis robot coupled with piezoelectricity. Under the positioning experiments to test robustness in many conditions, it proves that using two-phase combination drive can effectively the positioning error of piezoelectricity and improve positioning precision. The final positioning precision is ±40nm and the longest travel is 250mm, that can meet the requirement of large-travel and nano-scale for large-travel nano-scale position system.
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