Study of the Properties of High-entropy Alloys AlCrNbSiTiV-DLC Films by Magnetron Sputtering
碩士 === 龍華科技大學 === 機械工程系碩士班 === 106 === In this study, a DC-reactive magnetron sputtering system was used to deposit a diamond-like carbon (DLC) film. The high-entropy alloy target (AlCrNbSiTiV) was used to add the reaction gas methane (CH4) to form an AlCrNbSiTiV diamond-like carbon film. A high-ent...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/wj5yvw |