Development and Application of Humidity Sensor and Switch Dual Function MEMS Device
碩士 === 明新科技大學 === 光電系統工程系碩士班 === 106 === Design and develop of the device with dual functions of humidity sensing and switch based upon CIC CMOS MEMS common process is proposed in this study. Applying SolidWorks FloXpress to simulate the flow behavior in the structures of water collection and microc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/c545kb |