N-layer engineering on the performance of HIT solar cells
碩士 === 國立中興大學 === 光電工程研究所 === 106 === In this thesis, n-type hydrogenated amorphous silicon (a-Si:H) films with different band gaps (Eg), activity energy (Ea) and dark conductivity () were fabricated by modulated plasma power, pressure, RPH3 (PH3(1% in H2)/SiH4) and hydrogen dilution RH2 (H2/SiH4)...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2018
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Online Access: | http://ndltd.ncl.edu.tw/handle/6a87gh |