Sputtering Deposition of TiNxOy Thin Films Using Air as a Reactive Gas for Solar Selective Absorber Coatings Applications
碩士 === 國立中興大學 === 材料科學與工程學系所 === 106 === Titanium oxynitrides (TiNxOy) with tunable properties between TiN and TiO2 could be manipulated by tailored N/O ratio. Therefore, they have been used for diversified applications. In this studty, TiNxOy thin films were produced by unbalanced dc magnetron sput...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/697qt5 |