Growth of Wide-Bandgap Gallium-Oxide Based Thin Films and Their Applications for Deep- Ultraviolet Photodetectors
碩士 === 國立中興大學 === 材料科學與工程學系所 === 106 === In this thesis, ZnGa2O4 thin films were prepared on c-plane sapphire substrates by RF sputtering. Due to its wide bandgap, ZnGa2O4 films can be used for fabricating the metal-semiconductor-metal (MSM) deep ultraviolet photodetectors (DUVPDs). The sputtered Ga...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/f85gc9 |