Fabrication of N-Electrodes for Deep-Ultraviolet AlGaN LEDs and its Recovery Studies after Plasma Damage
碩士 === 國立中興大學 === 材料科學與工程學系所 === 106 === In this thesis, an ammonium hydroxide (NH4OH) mist annealing treatment was used to repair plasma-etched damage n-Al0.58Ga0.42N surface. The effects of annealing temperature and ammonium hydroxide solution concentration on the characteristics of metal/n-Al0.5G...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84j4db |