A Study of Effects on Thermal Fluid Transports with Fan Filter Units in a Clean Room Oven Area
碩士 === 國立中興大學 === 機械工程學系所 === 106 === This study was aimed to investigate the influence on temperature uniformity in a Class 100 clean room as the door of an oven used in the room was opened and closed during the oven process. The finite element analysis program, Fluent, was introduced for analysis....
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/awdq23 |