Study of Imprinting Parameters of Different Width Microstructures by Home-made Hot Embossing NanoImprint Lithography
碩士 === 國立勤益科技大學 === 機械工程系 === 106 === Nanoimprint lithography in decades has been one of the very hot research topic. In this study, a home-made hot embossing nanoimprint lithography machine was used to imprint different microstructure gratings. We used the different width grating, purchased from Ed...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/qr75zy |