A Study on the Effect of Different Heat Sources on Cleanroom Fan Filter Unit Distribution by Using Computational Fluid Dynamics
碩士 === 國立成功大學 === 工程管理碩士在職專班 === 106 === In the semiconductor factory buildings, all kinds of clean rooms of different cleanliness grades were set. At present, the cleanliness level and the air conditioning design are generally based on the definition in the United States Federal Standard (FS-209) s...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/z4zze4 |