Optimization for control parameters of chemicals dosing in a semiconductor fabrication plant
碩士 === 國立交通大學 === 工學院永續環境科技學程 === 106 === Manufacturing process of modern semiconductor devices are complex as well as use large amount of various chemicals, which are provided by the central chemical supply system. As the manufacturing machines run abnormally, the amount of chemicals fed by the cen...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/x6umvg |