| Summary: | 碩士 === 國立交通大學 === 工學院永續環境科技學程 === 106 === Manufacturing process of modern semiconductor devices are complex as well as use large amount of various chemicals, which are provided by the central chemical supply system.
As the manufacturing machines run abnormally, the amount of chemicals fed by the central factory increases. If this abnormality fails to be found at the earliest, the operational cost and risk will increase. By adding new parameters to the current chemicals management system, we might detect the machine failure immediately. This would lead to a higher efficiency of the chemicals management system as well as avoidance of unnecessary dose of chemicals.
The results have shown that by adding the daily demand time (DDT) and daily demand frequency (DDF) to current chemicals management system, the system is able to detect the abnormal situations of the machines. These two parameters were obtained by analyzing the demand status of each machine. From these analyses, the reference values of these two parameters were also determined. After 6-month testing, the DDT can be an indicator to detect the abnormality, and the probability of detecting the abnormal dose of chemicals is 100%; however, the detective probability of the abnormal dose of chemicals is 62.5% with the DDF. Therefore, the DDT is a more appropriate indicator than the DDF in detecting the abnormal dosing. Therefore, the DDT is an effective control parameter for the current management system. Although the probabilities of detecting the abnormal dosing were not always 100%, all abnormal situations were reported. Overall speaking, using DDT as an indicator to monitor chemical dosing in the manufacturing process of semiconductor fabrication plant is an effective approach.
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