Epitaxial Layer Transfer by Photoelectrical Chemical Etching (PEC)
碩士 === 國立交通大學 === 光電工程研究所 === 106 === The applications of high quality laser diodes and micro-LEDs have been booming in recent years. However, the cost of epitaxial growth on bulk GaN substrates is rather high. If the epitaxial layer could be transferred to another substrate, the original GaN substr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3h3dzh |