The study of epitaxial ZrN film on Si substrate by microwave plasma nitridation of ZrO2 and diamantane-assisted diamond nucleation on ZrN
碩士 === 國立交通大學 === 材料科學與工程學系所 === 106
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4ufkv6 |