The study of epitaxial ZrN film on Si substrate by microwave plasma nitridation of ZrO2 and diamantane-assisted diamond nucleation on ZrN

The study of epitaxial ZrN film on Si substrate by microwave plasma nitridation of ZrO2 and diamantane-assisted diamond nucleation on ZrN

碩士 === 國立交通大學 === 材料科學與工程學系所 === 106

Bibliographic Details
Main Authors: Chen, Wei-Lu, 陳威儒
Other Authors: Chang, Li
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/4ufkv6
id ndltd-TW-106NCTU5159022
record_format oai_dc
spelling ndltd-TW-106NCTU51590222019-05-16T00:08:12Z http://ndltd.ncl.edu.tw/handle/4ufkv6 The study of epitaxial ZrN film on Si substrate by microwave plasma nitridation of ZrO2 and diamantane-assisted diamond nucleation on ZrN 矽晶片上氮化ZrO2製備ZrN磊晶薄膜與雙金剛烷輔助鑽石成核於ZrN之研究 Chen, Wei-Lu 陳威儒 碩士 國立交通大學 材料科學與工程學系所 106 Chang, Li 張立 2017 學位論文 ; thesis 127 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立交通大學 === 材料科學與工程學系所 === 106
author2 Chang, Li
author_facet Chang, Li
Chen, Wei-Lu
陳威儒
author Chen, Wei-Lu
陳威儒
spellingShingle Chen, Wei-Lu
陳威儒
The study of epitaxial ZrN film on Si substrate by microwave plasma nitridation of ZrO2 and diamantane-assisted diamond nucleation on ZrN
author_sort Chen, Wei-Lu
title The study of epitaxial ZrN film on Si substrate by microwave plasma nitridation of ZrO2 and diamantane-assisted diamond nucleation on ZrN
title_short The study of epitaxial ZrN film on Si substrate by microwave plasma nitridation of ZrO2 and diamantane-assisted diamond nucleation on ZrN
title_full The study of epitaxial ZrN film on Si substrate by microwave plasma nitridation of ZrO2 and diamantane-assisted diamond nucleation on ZrN
title_fullStr The study of epitaxial ZrN film on Si substrate by microwave plasma nitridation of ZrO2 and diamantane-assisted diamond nucleation on ZrN
title_full_unstemmed The study of epitaxial ZrN film on Si substrate by microwave plasma nitridation of ZrO2 and diamantane-assisted diamond nucleation on ZrN
title_sort study of epitaxial zrn film on si substrate by microwave plasma nitridation of zro2 and diamantane-assisted diamond nucleation on zrn
publishDate 2017
url http://ndltd.ncl.edu.tw/handle/4ufkv6
work_keys_str_mv AT chenweilu thestudyofepitaxialzrnfilmonsisubstratebymicrowaveplasmanitridationofzro2anddiamantaneassisteddiamondnucleationonzrn
AT chénwēirú thestudyofepitaxialzrnfilmonsisubstratebymicrowaveplasmanitridationofzro2anddiamantaneassisteddiamondnucleationonzrn
AT chenweilu xìjīngpiànshàngdànhuàzro2zhìbèizrnlěijīngbáomóyǔshuāngjīngāngwánfǔzhùzuānshíchénghéyúzrnzhīyánjiū
AT chénwēirú xìjīngpiànshàngdànhuàzro2zhìbèizrnlěijīngbáomóyǔshuāngjīngāngwánfǔzhùzuānshíchénghéyúzrnzhīyánjiū
AT chenweilu studyofepitaxialzrnfilmonsisubstratebymicrowaveplasmanitridationofzro2anddiamantaneassisteddiamondnucleationonzrn
AT chénwēirú studyofepitaxialzrnfilmonsisubstratebymicrowaveplasmanitridationofzro2anddiamantaneassisteddiamondnucleationonzrn
_version_ 1719161670657376256

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