The study of epitaxial ZrN film on Si substrate by microwave plasma nitridation of ZrO2 and diamantane-assisted diamond nucleation on ZrN

The study of epitaxial ZrN film on Si substrate by microwave plasma nitridation of ZrO2 and diamantane-assisted diamond nucleation on ZrN

碩士 === 國立交通大學 === 材料科學與工程學系所 === 106

Bibliographic Details
Main Authors:	Chen, Wei-Lu, 陳威儒
Other Authors:	Chang, Li
Format:	Others
Language:	zh-TW
Published:	2017
Online Access:	http://ndltd.ncl.edu.tw/handle/4ufkv6

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