Epitaxial Growth and Characteristics Analysis of Aluminum Nanofilms

碩士 === 國立交通大學 === 電子研究所 === 106 === The thesis studies the growth of aluminum thin films on gallium arsenide substrate by using molecular beam epitaxy (MBE), which successfully grow large-area, continuous, and high-quality crystallinity aluminum thin films. The material characteristics, electrical p...

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Bibliographic Details
Main Authors: Fan, Yen-Ting, 范雁婷
Other Authors: Lin, Sheng-Di
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/368czt