High Quality Amorphous Indium-Gallium-Zinc-Oxide Thin Film by AP-PECVD for TFT-LCD Application
碩士 === 國立交通大學 === 電子研究所 === 106 === IGZO is made of indium oxide, gallium oxide, zinc oxide, oxide in a certain proportion which is used in today's LCD screen and all kinds of panels. IGZO made into TFT because of its carrier migration IGZO technology can improve the panel performance and reduc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/mfvknj |