Low-Voltage pH Sensor Fabricated by Low-Temperature a-IGZO and PEALD HfO2 Sensing Membrane
博士 === 國立交通大學 === 電子研究所 === 106 === Amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) have attracted significant attention recently in both industry and academia because of their high field-effect mobility, low fabrication temperature, large-area uniformity, and low fabrication cost. In add...
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| Format: | Others |
| Language: | en_US |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/tn2586 |