Evaluation of the Various Scaling Routes on Novel Poly-Si Junctionless Transistors

碩士 === 國立交通大學 === 電子物理系所 === 106 === For the demands and developments of semiconductor industry, the device dimension is scaled down continuously. In this dissertation, we investigate the pros and cons of the multi-gate poly-Si junctionless transistors in the various scaling routes. The routes are c...

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Bibliographic Details
Main Authors: Tsai, Chan-Yi, 蔡展壹
Other Authors: Chao, Tien-Shang
Format: Others
Language:en_US
Published: 2018
Online Access:http://ndltd.ncl.edu.tw/handle/t3jn55