Research on the lithographic property for fluoro and fluoro-oxygen based antireflective materials
碩士 === 國立交通大學 === 工學院半導體材料與製程設備學程 === 106 === Taiwan’s semiconductor foundry industry holds up to 50% market share around the globe, which indicates that Taiwan plays a significant role in this foundry industry. Semiconductor products require many kinds of artificial chemicals during the manufacture...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/hcd68g |