A Study of Ion Implanter Implanting Angle Calibration
碩士 === 國立交通大學 === 工學院半導體材料與製程設備學程 === 106 === With the advanced development of semiconductor manufacturing technology in recent decades, various kinds of electronic devices truly changed human’s life. The critical dimension also has reduced to nanometer scale. The ion implantation plays an important...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/j32eb5 |