none
碩士 === 國立中央大學 === 化學工程與材料工程學系 === 106 === In this study, we propose a facile approach, which is based on the oxygen plasma modified nanosphere lithography in conjunction with a one-step Au-assisted chemical etching process to fabricate periodic arrays of vertically-aligned, size-controllable Si nano...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/fq2p7s |