Effects of different crystal-crucible rotation conditions on flow, heat, and oxygen transport during Czochralski silicon crystal growth with a cusp magnetic field
博士 === 國立中央大學 === 能源工程研究所 === 106 === The Czochralski process nowadays becomes a main pulling method for the production of the commercial silicon wafers due to its relatively high growth rate and possible weight control. This technique, however, is facing to the big challenges how one can improve th...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4n7uf4 |