Study of Optical Thin Films by Optical Emission Spectrometer in the High-Power Impulse Magnetron Sputtering System
碩士 === 國立中央大學 === 機械工程學系在職專班 === 106 === In this study, High-Power Impulse Magnetron Sputtering (HiPIMS) deposition Silicon Nitride (Si3N4) thin films on B270 glass substrate was investigated using Si semiconductor material as the target. Using high power pulsed magnetron sputtering, by adjusting th...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/hyzsyk |