none
博士 === 國立中央大學 === 機械工程學系 === 106 === Since the trend of the Internet and Industrie 4.0 technology in recent years, massive promoted Micro-electromechanical systems (MEMS) result in the increasing demand of the sensors application. Thus, improving the degree-of-freedom on the fabrication of micro str...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/hr895z |