The Research of Improvement of the Accuracy of Amorphous Silicon TFT-LCD
碩士 === 國立中央大學 === 光電科學與工程學系 === 106 === This paper focuses on the thin line optimization method for the electrode totem when the thin film transistor LCD is used in the lithography process. In the past, only the exposure dose of the exposure machine was used to adjust and control the accuracy of the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/s63up5 |