Hard yet tough ZrB2/TiB2 multilayer coatings prepared by magnetron sputtering
碩士 === 國立東華大學 === 材料科學與工程學系 === 106 === This study was carried out in 3 series experiments. In the first series, thick 4-layered ZrB2/TiB2 multilayer was deposited on Si substrate by sputtering TiB2 and ZrB2 ceramic targets in different bias so as to choose a suitable bias voltage for rest of the ex...
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| Format: | Others |
| Language: | en_US |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72k26j |