Process Improvement For Low Loss and High Quality Ta2O5 Based Micro-ring Resonator
碩士 === 國立中山大學 === 光電工程學系研究所 === 106 === In this thesis, loss optimization within Ta2O5 based micro-ring resonator was investigated. Two methods were proposed and studied. First, to reduce the absorption of N-H bond from PECVD growth SiO2 cladding laser, sputtering growth cladding was proposed. Here,...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/356gbp |