Mechanism of Supercritical Fluid Repair Technology and Retention failure in RRAM
碩士 === 國立中山大學 === 材料與光電科學學系研究所 === 106 === Supercritical fluid (SCF) has solubility as a solvent-carrying substance, and high penetration force can penetrate the materials to eliminate defects and perform film modification. The semiconductor industry generally uses SCF to clean wafers, but this labo...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2018
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| Online Access: | http://ndltd.ncl.edu.tw/handle/954q8w |